Hao-Chiang Shao, Chia-Wen Lin, Shao-Yun Fang. Data-Driven Approaches for Process Simulation and Optical Proximity Correction. In Atsushi Takahashi 0001, editor, Proceedings of the 28th Asia and South Pacific Design Automation Conference, ASPDAC 2023, Tokyo, Japan, January 16-19, 2023. pages 721-726, ACM, 2023. [doi]
Abstract is missing.