Deepak K. Sharma, J. John, G. Supriya, Ashwini Jambhalikar, M. S. Giridhar. Process Development for Very Deep Etching of Silicon Using Two Layer Masks for Fabrication of Mechanically Decoupled MEMS Gyroscope. In 25th International Symposium on VLSI Design and Test, VDAT 2021, Surat, India, September 16-18, 2021. pages 1-4, IEEE, 2021. [doi]
Abstract is missing.