Polarity Dependency of MOL-TDDB in FinFET

Manisha Sharma, Hokyung Park, Yinghong Zhao, Ki-Don Lee, Liangshan Chen, Joonah Yoon, Rakesh Ranjan, Caleb Dongkyan Kwon, Hyewon Shim, Myungsoo Yeo, Shin-Young Chung, Jon Haefner. Polarity Dependency of MOL-TDDB in FinFET. In IEEE International Reliability Physics Symposium, IRPS 2023, Monterey, CA, USA, March 26-30, 2023. pages 1-3, IEEE, 2023. [doi]

Authors

Manisha Sharma

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Hokyung Park

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Yinghong Zhao

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Ki-Don Lee

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Liangshan Chen

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Joonah Yoon

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Rakesh Ranjan

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Caleb Dongkyan Kwon

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Hyewon Shim

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Myungsoo Yeo

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Shin-Young Chung

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Jon Haefner

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