Experimental extraction of point defects parameters needed for 2-D process modeling using reverse modeling - researchr publication authors

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Eitan N. Shauly, Richard Ghez, Yigal Komem. Experimental extraction of point defects parameters needed for 2-D process modeling using reverse modeling. In Proceedings of the 2004 11th IEEE International Conference on Electronics, Circuits and Systems, ICECS 2004, Tel Aviv, Israel, December 13-15, 2004. pages 362-364, IEEE, 2004. [doi]

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