Eitan N. Shauly, Richard Ghez, Yigal Komem. Experimental extraction of point defects parameters needed for 2-D process modeling using reverse modeling. In Proceedings of the 2004 11th IEEE International Conference on Electronics, Circuits and Systems, ICECS 2004, Tel Aviv, Israel, December 13-15, 2004. pages 362-364, IEEE, 2004. [doi]
@inproceedings{ShaulyGK04, title = {Experimental extraction of point defects parameters needed for 2-D process modeling using reverse modeling}, author = {Eitan N. Shauly and Richard Ghez and Yigal Komem}, year = {2004}, doi = {10.1109/ICECS.2004.1399693}, url = {http://dx.doi.org/10.1109/ICECS.2004.1399693}, researchr = {https://researchr.org/publication/ShaulyGK04}, cites = {0}, citedby = {0}, pages = {362-364}, booktitle = {Proceedings of the 2004 11th IEEE International Conference on Electronics, Circuits and Systems, ICECS 2004, Tel Aviv, Israel, December 13-15, 2004}, publisher = {IEEE}, isbn = {0-7803-8715-5}, }