Statistical modelling of the variation in advanced process technologies using a multi-level partitioned response

Santosh Shedabale, Hiran Ramakrishnan, Gordon Russell, Alexandre Yakovlev, S. Chattopadhyay. Statistical modelling of the variation in advanced process technologies using a multi-level partitioned response. IET Circuits, Devices & Systems, 2(5):451-464, 2008. [doi]

Authors

Santosh Shedabale

This author has not been identified. Look up 'Santosh Shedabale' in Google

Hiran Ramakrishnan

This author has not been identified. Look up 'Hiran Ramakrishnan' in Google

Gordon Russell

This author has not been identified. Look up 'Gordon Russell' in Google

Alexandre Yakovlev

This author has not been identified. Look up 'Alexandre Yakovlev' in Google

S. Chattopadhyay

This author has not been identified. Look up 'S. Chattopadhyay' in Google