Statistical modelling of the variation in advanced process technologies using a multi-level partitioned response

Santosh Shedabale, Hiran Ramakrishnan, Gordon Russell, Alexandre Yakovlev, S. Chattopadhyay. Statistical modelling of the variation in advanced process technologies using a multi-level partitioned response. IET Circuits, Devices & Systems, 2(5):451-464, 2008. [doi]

@article{ShedabaleRRYC08,
  title = {Statistical modelling of the variation in advanced process technologies using a multi-level partitioned response},
  author = {Santosh Shedabale and Hiran Ramakrishnan and Gordon Russell and Alexandre Yakovlev and S. Chattopadhyay},
  year = {2008},
  doi = {10.1049/iet-cds:20080031},
  url = {http://doi.ieeecomputersociety.org/10.1049/iet-cds:20080031},
  researchr = {https://researchr.org/publication/ShedabaleRRYC08},
  cites = {0},
  citedby = {0},
  journal = {IET Circuits, Devices & Systems},
  volume = {2},
  number = {5},
  pages = {451-464},
}