Towards Automated Micromachining of PMMA Micro Channels using CO/Sub 2/ Laser and Sacrificial Mask Process

Guangyi Shi, Qiang Huang, Wen J. Li, Wenqian Huang, Gengchen Shi, Kejie Li. Towards Automated Micromachining of PMMA Micro Channels using CO/Sub 2/ Laser and Sacrificial Mask Process. In Proceedings of the 2004 IEEE International Conference on Robotics and Automation, ICRA 2004, April 26 - May 1, 2004, New Orleans, LA, USA. pages 57-62, IEEE, 2004. [doi]

Abstract

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