A Resonant Pressure Microsensor Based on Double-Ended Tuning Fork and Electrostatic Excitation/Piezoresistive Detection

Xiaoqing Shi, Yulan Lu, Bo Xie, Yadong Li, Junbo Wang, Deyong Chen, Jian Chen 0012. A Resonant Pressure Microsensor Based on Double-Ended Tuning Fork and Electrostatic Excitation/Piezoresistive Detection. Sensors, 18(8):2494, 2018. [doi]

Authors

Xiaoqing Shi

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Yulan Lu

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Bo Xie

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Yadong Li

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Junbo Wang

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Deyong Chen

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Jian Chen 0012

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