A Resonant Pressure Microsensor Based on Double-Ended Tuning Fork and Electrostatic Excitation/Piezoresistive Detection

Xiaoqing Shi, Yulan Lu, Bo Xie, Yadong Li, Junbo Wang, Deyong Chen, Jian Chen 0012. A Resonant Pressure Microsensor Based on Double-Ended Tuning Fork and Electrostatic Excitation/Piezoresistive Detection. Sensors, 18(8):2494, 2018. [doi]

@article{ShiLXLWC018,
  title = {A Resonant Pressure Microsensor Based on Double-Ended Tuning Fork and Electrostatic Excitation/Piezoresistive Detection},
  author = {Xiaoqing Shi and Yulan Lu and Bo Xie and Yadong Li and Junbo Wang and Deyong Chen and Jian Chen 0012},
  year = {2018},
  url = {https://www.wikidata.org/entity/Q58805271},
  researchr = {https://researchr.org/publication/ShiLXLWC018},
  cites = {0},
  citedby = {0},
  journal = {Sensors},
  volume = {18},
  number = {8},
  pages = {2494},
}