Xiaoqing Shi, Yulan Lu, Bo Xie, Yadong Li, Junbo Wang, Deyong Chen, Jian Chen 0012. A Resonant Pressure Microsensor Based on Double-Ended Tuning Fork and Electrostatic Excitation/Piezoresistive Detection. Sensors, 18(8):2494, 2018. [doi]
Abstract is missing.