A design of phase-closed-loop nanomachining control based ultrasonic vibration-assisted AFM

Jialin Shi, Lianqing Liu, Peng Yu, Yang Cong. A design of phase-closed-loop nanomachining control based ultrasonic vibration-assisted AFM. In 2016 IEEE/RSJ International Conference on Intelligent Robots and Systems, IROS 2016, Daejeon, South Korea, October 9-14, 2016. pages 5193-5198, IEEE, 2016. [doi]

Abstract

Abstract is missing.