Electrical performance stability characterization of high-sensitivity Si-based EUV photodiodes in a harsh industrial application

L. Shi, Stoyan N. Nihtianov, F. Scholze, Lis K. Nanver. Electrical performance stability characterization of high-sensitivity Si-based EUV photodiodes in a harsh industrial application. In 38th Annual Conference on IEEE Industrial Electronics Society, IECON 2012, Montreal, QC, Canada, October 25-28, 2012. pages 3952-3957, IEEE, 2012. [doi]

Abstract

Abstract is missing.