Design strategy of localized halo profile for achieving sub-50 nm bulk MOSFET

Chun-Hsing Shih, Yi-Min Chen, Chenhsin Lien. Design strategy of localized halo profile for achieving sub-50 nm bulk MOSFET. Microelectronics Reliability, 44(7):1069-1075, 2004. [doi]

@article{ShihCL04,
  title = {Design strategy of localized halo profile for achieving sub-50 nm bulk MOSFET},
  author = {Chun-Hsing Shih and Yi-Min Chen and Chenhsin Lien},
  year = {2004},
  doi = {10.1016/j.microrel.2004.04.002},
  url = {http://dx.doi.org/10.1016/j.microrel.2004.04.002},
  tags = {design},
  researchr = {https://researchr.org/publication/ShihCL04},
  cites = {0},
  citedby = {0},
  journal = {Microelectronics Reliability},
  volume = {44},
  number = {7},
  pages = {1069-1075},
}