Wafer fabrication: 300mm wafer fabrication line simulation model

Sameer T. Shikalgar, David Fronckowiak, Edward A. MacNair. Wafer fabrication: 300mm wafer fabrication line simulation model. In Jane L. Snowdon, John M. Charnes, editors, Proceedings of the 34th Winter Simulation Conference: Exploring New Frontiers, San Diego, California, USA, December 8-11, 2002. pages 1365-1368, ACM, 2002. [doi]

Authors

Sameer T. Shikalgar

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David Fronckowiak

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Edward A. MacNair

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