Sameer T. Shikalgar, David Fronckowiak, Edward A. MacNair. Wafer fabrication: 300mm wafer fabrication line simulation model. In Jane L. Snowdon, John M. Charnes, editors, Proceedings of the 34th Winter Simulation Conference: Exploring New Frontiers, San Diego, California, USA, December 8-11, 2002. pages 1365-1368, ACM, 2002. [doi]
@inproceedings{ShikalgarFM02,
title = {Wafer fabrication: 300mm wafer fabrication line simulation model},
author = {Sameer T. Shikalgar and David Fronckowiak and Edward A. MacNair},
year = {2002},
doi = {10.1145/1030453.1030650},
url = {http://doi.acm.org/10.1145/1030453.1030650},
researchr = {https://researchr.org/publication/ShikalgarFM02},
cites = {0},
citedby = {0},
pages = {1365-1368},
booktitle = {Proceedings of the 34th Winter Simulation Conference: Exploring New Frontiers, San Diego, California, USA, December 8-11, 2002},
editor = {Jane L. Snowdon and John M. Charnes},
publisher = {ACM},
isbn = {0-7803-7615-3},
}