Sameer T. Shikalgar, David Fronckowiak, Edward A. MacNair. Wafer fabrication: 300mm wafer fabrication line simulation model. In Jane L. Snowdon, John M. Charnes, editors, Proceedings of the 34th Winter Simulation Conference: Exploring New Frontiers, San Diego, California, USA, December 8-11, 2002. pages 1365-1368, ACM, 2002. [doi]
Abstract is missing.