Seongbo Shim, Woohyun Chung, Youngsoo Shin. Defect Probability of Directed Self-Assembly Lithography: Fast Identification and Post-Placement Optimization. In Diana Marculescu, Frank Liu, editors, Proceedings of the IEEE/ACM International Conference on Computer-Aided Design, ICCAD 2015, Austin, TX, USA, November 2-6, 2015. pages 404-409, ACM, 2015. [doi]
Abstract is missing.