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Machine learning (ML)-based lithography optimizations

Seongbo Shim, Suhyeong Choi, Youngsoo Shin. Machine learning (ML)-based lithography optimizations. In 2016 IEEE Asia Pacific Conference on Circuits and Systems, APCCAS 2016, Jeju, South Korea, October 25-28, 2016. pages 530-533, IEEE, 2016. [doi]

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