Investigation of convex/concave channel shaping with confined charge trap nitride for high-reliability 3D NAND flash applications

Jeongmin Shin, Sohee Kim, Yun Heub Song. Investigation of convex/concave channel shaping with confined charge trap nitride for high-reliability 3D NAND flash applications. Microelectronics Journal, 171:107092, 2026. [doi]

Abstract

Abstract is missing.