A reliability study of DRAM capacitors in chip for beyond 10 nm scaling

Juyeon Shin, Kyungwon Park, Hakgun Kim, Kyungwoo Lee, Namhyun Lee, Chae-Hyuk Yun. A reliability study of DRAM capacitors in chip for beyond 10 nm scaling. Microelectronics Journal, 167:106942, 2026. [doi]

Abstract

Abstract is missing.