A Line Extraction Method for Automated SEM Inspection of VLSI Resist

D. B. Shu, C.-C. Li, J. F. Mancuso, Y. N. Sun. A Line Extraction Method for Automated SEM Inspection of VLSI Resist. IEEE Trans. Pattern Anal. Mach. Intell., 10(1):117-120, 1988. [doi]

Authors

D. B. Shu

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C.-C. Li

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J. F. Mancuso

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Y. N. Sun

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