A Line Extraction Method for Automated SEM Inspection of VLSI Resist

D. B. Shu, C.-C. Li, J. F. Mancuso, Y. N. Sun. A Line Extraction Method for Automated SEM Inspection of VLSI Resist. IEEE Trans. Pattern Anal. Mach. Intell., 10(1):117-120, 1988. [doi]

Abstract

Abstract is missing.