D. B. Shu, C.-C. Li, J. F. Mancuso, Y. N. Sun. A Line Extraction Method for Automated SEM Inspection of VLSI Resist. IEEE Trans. Pattern Anal. Mach. Intell., 10(1):117-120, 1988. [doi]
@article{ShuLMS88,
title = {A Line Extraction Method for Automated SEM Inspection of VLSI Resist},
author = {D. B. Shu and C.-C. Li and J. F. Mancuso and Y. N. Sun},
year = {1988},
url = {http://computer.org/tpami/tp1988/i0117abs.htm},
tags = {C++},
researchr = {https://researchr.org/publication/ShuLMS88},
cites = {0},
citedby = {0},
journal = {IEEE Trans. Pattern Anal. Mach. Intell.},
volume = {10},
number = {1},
pages = {117-120},
}