Model-free Multi-variable Learning Control of a Five Axis Nanopositioning Stage

Thijs Sieswerda, Andrew J. Fleming, Tom Oomen. Model-free Multi-variable Learning Control of a Five Axis Nanopositioning Stage. In IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM 2021, Delft, The Netherlands, July 12-16, 2021. pages 1190-1194, IEEE, 2021. [doi]

Abstract

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