Measuring the through-plane elastic modulus of thin polymer films in situ

M. van Soestbergen, Leo J. Ernst, Kaspar M. B. Jansen, W. D. van Driel. Measuring the through-plane elastic modulus of thin polymer films in situ. Microelectronics Reliability, 47(12):1983-1988, 2007. [doi]

Authors

M. van Soestbergen

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Leo J. Ernst

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Kaspar M. B. Jansen

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W. D. van Driel

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