Measuring the through-plane elastic modulus of thin polymer films in situ

M. van Soestbergen, Leo J. Ernst, Kaspar M. B. Jansen, W. D. van Driel. Measuring the through-plane elastic modulus of thin polymer films in situ. Microelectronics Reliability, 47(12):1983-1988, 2007. [doi]

Abstract

Abstract is missing.