M. van Soestbergen, Leo J. Ernst, Kaspar M. B. Jansen, W. D. van Driel. Measuring the through-plane elastic modulus of thin polymer films in situ. Microelectronics Reliability, 47(12):1983-1988, 2007. [doi]
@article{SoestbergenEJD07,
title = {Measuring the through-plane elastic modulus of thin polymer films in situ},
author = {M. van Soestbergen and Leo J. Ernst and Kaspar M. B. Jansen and W. D. van Driel},
year = {2007},
doi = {10.1016/j.microrel.2007.04.006},
url = {http://dx.doi.org/10.1016/j.microrel.2007.04.006},
researchr = {https://researchr.org/publication/SoestbergenEJD07},
cites = {0},
citedby = {0},
journal = {Microelectronics Reliability},
volume = {47},
number = {12},
pages = {1983-1988},
}