Highly Reliable/Manufacturable 4nm FinFET Platform Technology (SF4X) for HPC Application with Dual-CPP/HP-HD Standard Cells

Kihwang Son, Seulki Park, Kyunghoon Jung, Jun-Gyu Kim, Younggun Ko, Keonyong Cheon, Changkeun Yoon, Jiho Kim, Jaehun Jeong, Taehun Myung, Changmin Hong, Weonwi Jang, Min-Chul Sun, Sungil Jo, Ju-Youn Kim, Byungmoo Song, Yuri Yasuda-Masuoka, Ja-Hum Ku, Gitae Jeong. Highly Reliable/Manufacturable 4nm FinFET Platform Technology (SF4X) for HPC Application with Dual-CPP/HP-HD Standard Cells. In 2023 IEEE Symposium on VLSI Technology and Circuits (VLSI Technology and Circuits), Kyoto, Japan, June 11-16, 2023. pages 1-2, IEEE, 2023. [doi]

@inproceedings{SonPJKKCYKJMHJS23,
  title = {Highly Reliable/Manufacturable 4nm FinFET Platform Technology (SF4X) for HPC Application with Dual-CPP/HP-HD Standard Cells},
  author = {Kihwang Son and Seulki Park and Kyunghoon Jung and Jun-Gyu Kim and Younggun Ko and Keonyong Cheon and Changkeun Yoon and Jiho Kim and Jaehun Jeong and Taehun Myung and Changmin Hong and Weonwi Jang and Min-Chul Sun and Sungil Jo and Ju-Youn Kim and Byungmoo Song and Yuri Yasuda-Masuoka and Ja-Hum Ku and Gitae Jeong},
  year = {2023},
  doi = {10.23919/VLSITechnologyandCir57934.2023.10185365},
  url = {https://doi.org/10.23919/VLSITechnologyandCir57934.2023.10185365},
  researchr = {https://researchr.org/publication/SonPJKKCYKJMHJS23},
  cites = {0},
  citedby = {0},
  pages = {1-2},
  booktitle = {2023 IEEE Symposium on VLSI Technology and Circuits (VLSI Technology and Circuits), Kyoto, Japan, June 11-16, 2023},
  publisher = {IEEE},
  isbn = {978-4-86348-806-9},
}