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Cut Optimization for Redundant Via Insertion in Self-Aligned Double Patterning

Youngsoo Song, Daijoon Hyun, Jingon Lee, Jinwook Jung, Youngsoo Shin. Cut Optimization for Redundant Via Insertion in Self-Aligned Double Patterning. ACM Trans. Design Autom. Electr. Syst., 24(6), 2019. [doi]

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Youngsoo Song

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Daijoon Hyun

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Jingon Lee

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Jinwook Jung

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Youngsoo Shin

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