Cut Optimization for Redundant Via Insertion in Self-Aligned Double Patterning

Youngsoo Song, Daijoon Hyun, Jingon Lee, Jinwook Jung, Youngsoo Shin. Cut Optimization for Redundant Via Insertion in Self-Aligned Double Patterning. ACM Trans. Design Autom. Electr. Syst., 24(6), 2019. [doi]

Abstract

Abstract is missing.