Cut Optimization for Redundant Via Insertion in Self-Aligned Double Patterning

Youngsoo Song, Daijoon Hyun, Jingon Lee, Jinwook Jung, Youngsoo Shin. Cut Optimization for Redundant Via Insertion in Self-Aligned Double Patterning. ACM Trans. Design Autom. Electr. Syst., 24(6), 2019. [doi]

@article{SongHLJS19,
  title = {Cut Optimization for Redundant Via Insertion in Self-Aligned Double Patterning},
  author = {Youngsoo Song and Daijoon Hyun and Jingon Lee and Jinwook Jung and Youngsoo Shin},
  year = {2019},
  doi = {10.1145/3355391},
  url = {https://doi.org/10.1145/3355391},
  researchr = {https://researchr.org/publication/SongHLJS19},
  cites = {0},
  citedby = {0},
  journal = {ACM Trans. Design Autom. Electr. Syst.},
  volume = {24},
  number = {6},
}