A Novel Piezoresistive MEMS Pressure Sensors Based on Temporary Bonding Technology

Peishuai Song, Chaowei Si, Mingliang Zhang, Yongmei Zhao, Yurong He, Wen Liu, Xiaodong Wang. A Novel Piezoresistive MEMS Pressure Sensors Based on Temporary Bonding Technology. Sensors, 20(2):337, 2020. [doi]

Authors

Peishuai Song

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Chaowei Si

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Mingliang Zhang

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Yongmei Zhao

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Yurong He

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Wen Liu

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Xiaodong Wang

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