Peishuai Song, Chaowei Si, Mingliang Zhang, Yongmei Zhao, Yurong He, Wen Liu, Xiaodong Wang. A Novel Piezoresistive MEMS Pressure Sensors Based on Temporary Bonding Technology. Sensors, 20(2):337, 2020. [doi]
@article{SongSZZHLW20,
title = {A Novel Piezoresistive MEMS Pressure Sensors Based on Temporary Bonding Technology},
author = {Peishuai Song and Chaowei Si and Mingliang Zhang and Yongmei Zhao and Yurong He and Wen Liu and Xiaodong Wang},
year = {2020},
doi = {10.3390/s20020337},
url = {https://doi.org/10.3390/s20020337},
researchr = {https://researchr.org/publication/SongSZZHLW20},
cites = {0},
citedby = {0},
journal = {Sensors},
volume = {20},
number = {2},
pages = {337},
}