A Novel Piezoresistive MEMS Pressure Sensors Based on Temporary Bonding Technology

Peishuai Song, Chaowei Si, Mingliang Zhang, Yongmei Zhao, Yurong He, Wen Liu, Xiaodong Wang. A Novel Piezoresistive MEMS Pressure Sensors Based on Temporary Bonding Technology. Sensors, 20(2):337, 2020. [doi]

Abstract

Abstract is missing.