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A Monolithic Integration Bio-Inspired Three-Dimensional MEMS Vector Hydrophone

Jinlong Song, Renxin Wang, Guojun Zhang, Zhenzhen Shang, Lansheng Zhang, Wendong Zhang. A Monolithic Integration Bio-Inspired Three-Dimensional MEMS Vector Hydrophone. IEEE Access, 7:102366-102376, 2019. [doi]

Authors

Jinlong Song

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Renxin Wang

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Guojun Zhang

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Zhenzhen Shang

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Lansheng Zhang

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Wendong Zhang

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