A Monolithic Integration Bio-Inspired Three-Dimensional MEMS Vector Hydrophone

Jinlong Song, Renxin Wang, Guojun Zhang, Zhenzhen Shang, Lansheng Zhang, Wendong Zhang. A Monolithic Integration Bio-Inspired Three-Dimensional MEMS Vector Hydrophone. IEEE Access, 7:102366-102376, 2019. [doi]

@article{SongWZSZZ19,
  title = {A Monolithic Integration Bio-Inspired Three-Dimensional MEMS Vector Hydrophone},
  author = {Jinlong Song and Renxin Wang and Guojun Zhang and Zhenzhen Shang and Lansheng Zhang and Wendong Zhang},
  year = {2019},
  doi = {10.1109/ACCESS.2019.2924990},
  url = {https://doi.org/10.1109/ACCESS.2019.2924990},
  researchr = {https://researchr.org/publication/SongWZSZZ19},
  cites = {0},
  citedby = {0},
  journal = {IEEE Access},
  volume = {7},
  pages = {102366-102376},
}