A Monolithic Integration Bio-Inspired Three-Dimensional MEMS Vector Hydrophone

Jinlong Song, Renxin Wang, Guojun Zhang, Zhenzhen Shang, Lansheng Zhang, Wendong Zhang. A Monolithic Integration Bio-Inspired Three-Dimensional MEMS Vector Hydrophone. IEEE Access, 7:102366-102376, 2019. [doi]

Abstract

Abstract is missing.