Thermally induced wrinkling in thin-film stacks on patterned substrates

Kartik Srinivasan, Sanjay Goyal, Thomas Siegmund, Ganesh Subbarayan, Qinghuang Lin. Thermally induced wrinkling in thin-film stacks on patterned substrates. IBM Journal of Research and Development, 53(3):12, 2009. [doi]

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