Thermally induced wrinkling in thin-film stacks on patterned substrates

Kartik Srinivasan, Sanjay Goyal, Thomas Siegmund, Ganesh Subbarayan, Qinghuang Lin. Thermally induced wrinkling in thin-film stacks on patterned substrates. IBM Journal of Research and Development, 53(3):12, 2009. [doi]

Abstract

Abstract is missing.