Nicholas A. Strnad, Ryan R. Knight, Ryan Q. Rudy, Robert R. Benoit, Wendy L. Sarney, Jeffrey S. Pulskamp. Atomic Layer Deposition and Sputtering of Piezoelectric Thin Films for Improved IMU Performance. In IEEE/ION Position, Location and Navigation Symposium, PLANS 2023, Monterey, CA, USA, April 24-27, 2023. pages 10-17, IEEE, 2023. [doi]
Abstract is missing.