Accurate Measurements of Small Resistances in Vertical Interconnects with Small Aspect Ratios

Michele Stucchi, Ferenc Fodor, Erik Jan Marinissen. Accurate Measurements of Small Resistances in Vertical Interconnects with Small Aspect Ratios. In IEEE European Test Symposium, ETS 2020, Tallinn, Estonia, May 25-29, 2020. pages 1-6, IEEE, 2020. [doi]

Abstract

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