Development of a dual-stage virtual metrology architecture for TFT-LCD manufacturing

Yu-Chuan Su, Wen-Huang Tsai, Fan-Tien Cheng, Wei-Ming Wu. Development of a dual-stage virtual metrology architecture for TFT-LCD manufacturing. In 2008 IEEE International Conference on Robotics and Automation, ICRA 2008, May 19-23, 2008, Pasadena, California, USA. pages 3630-3635, IEEE, 2008. [doi]

Abstract

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