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Ultra-low Leakage IGZO-TFTs with Raised Source/Drain for Vt > 0 V and Ion > 30 µA/µm

S. Subhechha, Nouredine Rassoul, A. Belmonte, H. Hody, Harold Dekkers, Michiel J. van Setten, Adrian Chasin, Shamin H. Sharifi, S. Sutar, L. Magnarin, Umberto Celano, H. Puliyalil, S. Kundu, M. Pak, Lieve Teugels, D. Tsvetanova, N. Bazzazian, Kevin Vandersmissen, C. Biasotto, D. Batuk, J. Geypen, J. Heijlen, Romain Delhougne, Gouri Sankar Kar. Ultra-low Leakage IGZO-TFTs with Raised Source/Drain for Vt > 0 V and Ion > 30 µA/µm. In IEEE Symposium on VLSI Technology and Circuits (VLSI Technology and Circuits 2022), Honolulu, HI, USA, June 12-17, 2022. pages 292-293, IEEE, 2022. [doi]

Authors

S. Subhechha

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Nouredine Rassoul

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A. Belmonte

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H. Hody

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Harold Dekkers

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Michiel J. van Setten

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Adrian Chasin

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Shamin H. Sharifi

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S. Sutar

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L. Magnarin

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Umberto Celano

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H. Puliyalil

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S. Kundu

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M. Pak

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Lieve Teugels

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D. Tsvetanova

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N. Bazzazian

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Kevin Vandersmissen

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C. Biasotto

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D. Batuk

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J. Geypen

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J. Heijlen

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Romain Delhougne

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Gouri Sankar Kar

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