Non Contacting Measurement of Surface Resistivity Using Phi Type Electrodes - researchr publication authors

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Toshiyuki Sugimoto, Hiromu Ishii, Yoshio Higashiyama. Non Contacting Measurement of Surface Resistivity Using Phi Type Electrodes. In Industry Applications Society Annual Meeting, IAS 2008, Edmonton, Alberta, Canada, 5-9 Octobert, 2008. pages 1-6, IEEE, 2008. [doi]

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