Non Contacting Measurement of Surface Resistivity Using Phi Type Electrodes

Toshiyuki Sugimoto, Hiromu Ishii, Yoshio Higashiyama. Non Contacting Measurement of Surface Resistivity Using Phi Type Electrodes. In Industry Applications Society Annual Meeting, IAS 2008, Edmonton, Alberta, Canada, 5-9 Octobert, 2008. pages 1-6, IEEE, 2008. [doi]

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