Design of 60 GHz contactless probe system for RDL in passive silicon interposer

Edward J. Suh, Paul D. Franzon. Design of 60 GHz contactless probe system for RDL in passive silicon interposer. In 2013 IEEE International 3D Systems Integration Conference (3DIC), San Francisco, CA, USA, October 2-4, 2013. pages 1-5, IEEE, 2013. [doi]

Abstract

Abstract is missing.