A pattern mining framework for inter-wafer abnormality analysis

Nik Sumikawa, Li-C. Wang, Magdy S. Abadir. A pattern mining framework for inter-wafer abnormality analysis. In 2013 IEEE International Test Conference, ITC 2013, Anaheim, CA, USA, September 6-13, 2013. pages 1-10, IEEE Computer Society, 2013. [doi]

Authors

Nik Sumikawa

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Li-C. Wang

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Magdy S. Abadir

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