Center embossed diaphragm design guidelines and Fabry-Perot diaphragm fiber optic sensor

Yan Sun, Ganhua Feng, George Georgiou, Edip Niver, Karen Noe, Ken Chin. Center embossed diaphragm design guidelines and Fabry-Perot diaphragm fiber optic sensor. Microelectronics Journal, 39(5):711-716, 2008. [doi]

Abstract

Abstract is missing.