Adversarial Sample Generation for Lithography Hotspot Detection

Shuyuan Sun, Yiyang Jiang, Fan Yang, Xuan Zeng 0001. Adversarial Sample Generation for Lithography Hotspot Detection. In IEEE International Symposium on Circuits and Systems, ISCAS 2022, Austin, TX, USA, May 27 - June 1, 2022. pages 3503-3506, IEEE, 2022. [doi]

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